(Imprint equipment, imprint lithography, NIL)
Nanoimprinting is a process used to make fine patterns by transferring molds having nanosized patterns to a resist.
From wafers to large panels of G5 size, we can supply equipment for a wide range of nanoimprints, which prevents voids even in complicated patterns by imprinting in a vacuum.
Currently, nanoimprinting has been proposed for diverse applications, from optical surface modification such as deflection to microcircuit pattern forming and bio- or display-related ones. We can also offer other solutions to suit your needs.
Company:Shin-Etsu Engineering Co., LTD.